Abstract
Slit scattering of beam particles in a microbeam set-up becomes significant for low current applications and thus limits its lateral resolution and application potential. In this work, the angular and energy distributions of beam particles interacting with cylindrically shaped slit-jaws of different radii, surface roughnesses, and materials are calculated numerically, employing the computer code SRIM. To quantitatively investigate their effect on the beam spot quality of a microbeam set-up, a quality factor is proposed as an index to evaluate the effect of slit-scattered particles on the beam spot. The results of the investigation reveal a high sensitivity of slit scattering in relation to the slit-jaw surface roughness.
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