Abstract
Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of microelectromechanical system devices. There are two kinds of film damping existing in microelectromechanical system devices, for instance, slide film damping and squeeze film damping. This article presents an overview on the recent research progress on the slide film damping in microelectromechanical system devices. Based on the first slip velocity boundary conditions, this article discusses two kinds of damping models in detail, which commonly used to investigate on the slide film damping. For the convenience of quick reference in future, laterally moving microstructures, adequate important equations and applicable conditions are included in this article. Finally, we proposed two unified models for the analysis and design of laterally moving microstructured devices.
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Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems
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