Single-unit metalens integrated micro light-emitting diodes

Abstract

Metalenses, characterized by their discontinuous local phase shifts, are optically analogous to macroscopic curved lenses but are flat and scaled down to micrometer dimensions. Their compactness and compatibility with semiconductor manufacturing processes facilitate monolithic integration into existing optical devices. Here, we report on the integration of metalenses with micro light-emitting diodes (μ-LEDs), resulting in enhanced extraction efficiency and directionality. The metalenses were composed of identical nanohole units, each 150 nm in diameter, strategically arranged to induce desired local phase shifts at specific coordinates by varying the density of these units. Both simulated and experimental results demonstrated that these easy-configuration metalenses effectively focused a plane wave at a predetermined spot and collimated a diverging light source at the focal spot, exemplifying optical reciprocity. When integrated with ultraviolet (λ = 390 nm) 60 μm-sized μ-LEDs, the metalenses significantly improved device performance, exhibiting a 338% enhancement in peak intensity and a ±8° reduction in beam divergence compared to an unpatterned μ-LED. We believe that metalens-integrated μ-LEDs with high brightness, directionality, and resolution are optimally suited for near-eye applications, including virtual reality and augmented reality displays.