Abstract
Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry : Leng, J.M.; Sidorowich, JJ.; Yoon, Y.D.; Opsal, Y.D.; Lee, B.H.; Cha, G.; Moon, J.; Lee, S.I. Journal of Applied Physics, Vol. 81, No. 8, pp. 3570–3578 (1997)
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