Abstract
A Shack-Hartmann wavefront sensor (SHWS) uses a lenslet array to sample incoming wavefront onto a CCD. By comparing the focal spots images of the sample and a reference, wavefront profile is reconstructed and therefore the sample shape is revealed. Various factors affect the performance of SHWS. In order to study how and to which extend does each factor affect the reconstruction result, we established a simulation platform in MATLAB. Detailed properties, especially the configuration of the lenslet array related issues, were analyzed through this system-oriented platform, and by doing so we obtained some guidance in surface measurement experiment.
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