Abstract
Recent development of MEMS technologies has provided a set of methods for mass production of three-dimensional micro-scale structures and have opened the door to new and exciting possibilities in vacuum electronics devices. These micro-fabricated vacuum electronic devices are popular for the advantages of small volume, low cost, good performance, etc. In this article, Cold characteristics of a miniature coupled cavity slow-wave structure are simulated and discussed by using 3-D electromagnetic software MAFIA. The results show that this miniature structure can work at near 1.3 THz with high interaction impedance about 20 ohm and can be expected to be a promising THz radiation source.
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