Abstract
Simulation and experimental testing of a miniaturized, lateral, electron-impact ionization source are reported. Modeling and subsequent optimization of the device design led to a tenfold improvement in the performance of the device in comparison with earlier designs. Increased electron current contributing to ionization and increased ion collection efficiency are believed to be the main factors responsible for this improvement. SIMION software was used to model the behavior of the devices and understand the improvement in performance. The ion source can operate in a wide pressure range from 0.1 to 100 mTorr and generate ion currents in excess of 1 μA.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
