Abstract
A novel doubly decoupled bulk micromachined lateral gyroscope, proposed in our former work, can efficiently suppress the undesired mechanical coupling, while remaining symmetric in structure. Both theoretical simulations and experiments are carried out to analyze the decoupling property of this gyroscope. The simulated results show that the driving and sensing mode frequencies are 3.821 kHz and 3.956 kHz, respectively. Furthermore, the displacements of the driving mode and sensing mode are also simulated by ANSYS™. In driving mode, simulation result shows that the mechanical coupling from the driving mode to sensing mode is 8%. Similarly, in sensing mode, the mechanical coupling from the sensing mode to driving mode is 0.9%. Micro Laser Doppler vibration meter is employed to detect mechanical coupling in the sensing mode. The test result is about 2%, close to the simulated value.
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