Abstract
We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
