Significance of size dependent and material structure coupling on the characteristics and performance of nanocrystalline micro/nano gyroscopes

Abstract

Capacitive-based sensing microelectromechanical (MEMS) and nanoelectromechanical (NEMS) gyroscopes have significant advantages over conventional gyroscopes, such as low power consumption, batch fabrication, and possible integration with electronic circuits. However, inadequacies in the modeling of these inertial sensors have presented issues of reliability and functionality of micro-/nano-scale gyroscopes. In this work, a micromechanical model is developed to represent the unique microstructure of nanocrystalline materials and simulate the response of micro-/nano-gyroscope comprising an electrostatically-actuated cantilever beam with a tip mass at the free end. Couple stress and surface elasticity theories are integrated into the classical Euler-Bernoulli beam model in order to derive a size-dependent model. This model is then used to investigate the influence of size-dependent effects on the static pull-in instability, the natural frequencies and the performance output of gyroscopes as the scale decreases from micro-to nano-scale. The simulation results show significant changes in the static pull-in voltage and the natural frequency as the scale of the system is decreased. However, the differential frequency between the two vibration modes of the gyroscope is observed to drastically decrease as the size of the gyroscope is reduced. As such, the frequency-based operation mode may not be an efficient strategy for nano-gyroscopes. The results show that a strong coupling between the surface elasticity and material structure takes place when smaller grain sizes and higher void percentages are considered.