Abstract
In this work we analyze the behavior of pressure sensors based on membranes of chemically very inert materials and robust to atmospheric agents with non-neutral pH. The selected material for cheapness and chemical stability for the manufacture of low-cost pressure sensors is Silicon Carbide, even if a special section is dedicated to diamond membranes pressure sensors because of its unique chemical inertness. Considering also the electromagnetic noise as an aggressive element of the measurement environment, the low-cost reproduction via sensor - optical fiber coupling of a low-finesse Fabry-Perot interferometer was chosen as the reading setup. SiC membranes are realized by nanosecond LASER processing while those in diamond are made by CVD deposition and microelectronic etching techniques.
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