Abstract
Manufacturing technology in the field of Large-Scale-Integrated (LSI) circuit production has overcome the problems of enlarged wafer size and increasing level of integration. The market environment of the LSI industry has become more demanding with increased requirements, delivery time and stiffer cost competition. A Computer-Integrated Manufacturing System (CIMS) well-adapted to the unique characteristics of LSI production system is thus urgently needed. This paper describes the development of CIMS in LSI production systems, and presents the example of a DTS (Diffusion Total System), constructed in a real LSI wafer fabrication factory. Features of DTS are (a) on-line real-time manufacturing data acquisition and monitoring through a production information network, (b) automatic control of process equipment, (c) shop floor control for computer aided decision support at the shop floor level, and (d) data analysis and reporting derived from a large amount of accumulated data. This paper deals with shop floor control, and in particular with a priority control system unique to the LSI wafer fabrication line.
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