Abstract
Summary form only given. To control the shape of high density plasma has been one of the issues for the application of plasma to industrial usages. Therefore, ECR plasma is a good candidate of a high density plasma. A sheet shaped high density plasma could be used to modify the surface of materials uniformly and as the basis for electron accelerators. The discharge parameters, such as ECR condition related to the magnetic field configuration, gas pressure, microwave wavelength, and power were parameters which affect the shape, size and density of plasma. The microwave propagation phenomenon is considered to be the nonlinear interaction between the plasma and microwave resulting in the final shape of plasma. This interaction has been studied by experiments measuring the plasma density profile in the plasma cross sections with different discharge parameters.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
