Shear Horizontal Phononic Metasurface for In-Liquid Gravimetric Biosensing

Abstract

In-liquid wave attenuation is the major factor that limits the resolution of acoustic wave biosensors. Existing acoustic wave devices rely on shear mode operation to reduce the mechanical motion transferred to the liquid. However, the energy leakage still exists through acoustic radiation. In this article, we combined phononic metasurface based on local mechanical resonators with shear horizontal surface acoustic wave (SH-SAW) to address the above issue. The shear-horizontal phononic metasurface (SH-PM) resonator is made of periodic high-aspect-ratio electrode (HARE). It produces a slow phononic wave that cannot propagate in water due to its low velocity, which suppresses the acoustic radiation. Furthermore, as the particle motion of the HARE is polarized in shear mode, the SH-PM also reduces the mechanical motion transfer to water. The minimization of the total acoustic energy leakage in the SH-PM results in high quality factor (Q) resonance in water. Besides, the increased surface-to-volume ratio of the HAREs also enhances the mass sensitivity of the device. Experimental results show that the SH-PM resonator achieved an in-liquid Q factor of 230 and a normalized mass sensitivity of - 192.4 <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">cm</i> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /g. The high in-liquid Q factor together with the high mass sensitivity makes the SH-PM a promising candidate for high-resolution gravimetric detection of biomolecules.