Abstract
A new technology is presented in a concise form which enables the silicon membranes to be produced over a wide range of channel dimensions from a few nanometers to tens of micrometers. There is good reason to believe that this method based on rather simple technical processing is competitive with other technologies for fabricating nanofluidic analysis systems. Some of the completed developments involving microchannel membranes, namely, the optical DNA-sensor and the human cell separation system are demonstrated without going into details. The other applications of micro- and nanochannel membranes, namely, the electrical sensor and electrokinetic filters for detecting and separating liquids and biomolecules are shown with the first results and are in progress.
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