Abstract

Vertically aligned multi-walled carbon nanotubes (VA-MWCNTs) with an average diameter below 80 nm and a thickness of the uniform VA-MWCNT layer of about 16 μm were grown in microwave plasma torch and tested for selected functional properties. IR absorption important for a construction of bolometers was studied by Fourier transform infrared spectroscopy. Basic electrochemical characterization was performed by cyclic voltammetry. Comparing the obtained results with the standard or MWCNT‐modified screen-printed electrodes, the prepared VA-MWCNT electrodes indicated their high potential for the construction of electrochemical sensors. Resistive CNT gas sensor revealed a good sensitivity to ammonia taking into account room temperature operation. Field emission detected from CNTs was suitable for the pressure sensing application based on the measurement of emission current in the diode structure with bending diaphragm. The advantages of microwave plasma torch growth of CNTs, i.e., fast processing and versatility of the process, can be therefore fully exploited for the integration of surface-bound grown CNTs into various sensing structures.

Highlights

  • Carbon nanotubes (CNTs), a synthetic carbon allotrope, are made of sp2 hybridized carbon atoms.Single-walled CNT (SWCNT) is a graphene sheet rolled-up into a seamless cylinder and multi-walledCNT (MWCNT) is composed of several such cylinders, nested concentrically [1,2]

  • The characterization of the VA-MWCNT films by SEM, transmission electron microscopy (TEM), Raman spectroscopy and the influence of process parameters on the CNT growth were discussed in detail in our previous publications [3,46,47]

  • Selected functional properties of VA-MWCNT films were investigated in different types of measurement devices that integrated CNTs prepared in a microwave plasma torch

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Summary

Introduction

Carbon nanotubes (CNTs), a synthetic carbon allotrope, are made of sp hybridized carbon atoms.Single-walled CNT (SWCNT) is a graphene sheet rolled-up into a seamless cylinder and multi-walledCNT (MWCNT) is composed of several such cylinders, nested concentrically [1,2]. Carbon nanotubes (CNTs), a synthetic carbon allotrope, are made of sp hybridized carbon atoms. Single-walled CNT (SWCNT) is a graphene sheet rolled-up into a seamless cylinder and multi-walled. CNT (MWCNT) is composed of several such cylinders, nested concentrically [1,2]. CNTs are often synthesized by a chemical vapor deposition (CVD) in the presence of a catalyst, nanoparticles of transition metals. In thermal CVD, a carbon-containing gas mixture is heated typically to 550–1100 °C by a conventional heat source. Plasma enhanced CVD (PECVD) activates the gas mixture by ignition of plasma discharge but a separate heating of the substrate might be required too [3]. General arguments for the PECVD include low-temperature, achieved vertical alignment and large area processing [4].The

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