Abstract
In drug delivery systems, the demand for precise microdroplet detection has prompted the utilization of flexible capacitive sensors. Traditional capacitive sensor structures, including coplanar electrodes and parallel plate capacitance, exhibit inherent geometric properties that significantly impact accuracy, sensitivity, and stability. This study explores the semi-cylindrical and cylindrical cross-capacitance sensor designs to enhance these performance metrics for microdroplet detection applications. This research work encompasses the development, analysis, simulation studies, fabrication process, and experimental investigations of these sensor designs. It was observed that they demonstrate notable changes in capacitance values for variations in the volume of liquid droplets, alterations in the relative permittivity of liquid samples, and the change in the velocity of free-flying liquid. The sensor structures are systematically examined across a range of liquid droplet sizes and liquids with varying dielectric constants. The response of the semi-cylindrical capacitive sensor proves to be accurate, significant, and fast, yielding high repeatability of ±0.032% and an impressive sensitivity of 0.7409 fF/μL. These findings position the presented sensor as an ideal candidate for microdroplet detection in drug delivery applications, which showcases its suitability for medical field.
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