Abstract
Novel multilayer structured TiBN coatings were deposited on Si (100) substrate using TiBN complex cathode plasma immersion ion implantation and deposition technique (PIIID). The coatings were characterized by X-ray diffraction (XRD), high-resolution transmission electron microcopy (HRTEM), energy-dispersive spectrometer (EDS) and ball-on-disk test. XRD results reveal that both samples of TiBN coatings have the main diffraction peak of TiN (200) and (220). Cross-section TEM images reveal that these coatings have the character of self-forming multilayer and consists of face-centered cubic TiN and hexagonal BN nanocrystalline embedded in amorphous matrix. Because of the existence of hexagonal BN, the friction coefficient of the new TiBN coating in room temperature is obviously lower than that of the monolithic TiN nanocrystalline coating.
Highlights
For high-speed precision instruments in aerospace and other high-tech fields, reducing the heat yield of the device is the basis for work piece stability [1]
In order to characterize and understand the structure/composition relationship in the TiBN coating, the nanostructure and hexagon BN phase were examined by high-resolution transmission electron microcopy (HRTEM) in the newly developed coating, which have the capacity of containing low coefficient in high-temperature condition
Ternary TiBN coating was deposited onto polished single Si (100) substrates by using plasma immersion ion implantation and deposition technique (PIIID) equipped with a TiBN complex cathode and is composed of the desired implanting and deposition material
Summary
For high-speed precision instruments in aerospace and other high-tech fields, reducing the heat yield of the device is the basis for work piece stability [1]. Surface modification technology can significantly improve the surface performance with micro size decals while containing mechanical properties of the matrix [2,3,4] Solid lubrication materials, such as MoS2, V2O5, DLC, and WS2, have been developed and widely applied in satellite, spaceship, aerospace equipment, and the space station [5,6,7,8,9,10,11]. Few of these coating systems have the capacity of containing low coefficient in a hightemperature condition [12], while more and more industrial parts especially high accuracy bearings require low friction performance under the condition of high temperature in the field of aerospace. In order to characterize and understand the structure/composition relationship in the TiBN coating, the nanostructure and hexagon BN phase were examined by high-resolution transmission electron microcopy (HRTEM) in the newly developed coating, which have the capacity of containing low coefficient in high-temperature condition
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