Abstract
The paper presents experimental results of secondary ion energy distributions obtained for Ti and Si targets bombarded by 20–30 keV monoisotope Ar + ion beam. The influence of the extraction voltages between target and a slit of the electrostatic energy analyzer entrance on the energy distributions of secondary ions was investigated. After optimization of the secondary ion extraction system, the mass spectra of secondary ions were also measured. The investigations were done using recently built experimental system. Experimental data are compared with the computer simulation results obtained using TRQR and SATVAL codes.
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