Secondary-ion emission from clean and oxygen-covered beryllium surfaces: II. Energy dependence

Abstract

The secondary-ion energy distribution obtained by sputtering clean and oxygen-covered Be has been analyzed in terms of competing processes in secondary ion emission. The ion energy distribution N +( E) has been separated into an ionization coefficient R +( E) and a total energy distribution, N( E), i.e. N +( E) = R +( E) N( E). Experimentally, the dependence of R +( E) on both energy and oxygen coverage indicated a linear superposition of adiabatic tunneling and resonanance ionization processes from clean and oxygen-covered portions of the surface with no contributions to the secondary-ion yield from regions of intermediate coverage. Total energy distributions of sputtered Be atoms have been deduced and the principal features agree with the predictions of the collision cascade sputtering model. Variations of the energy distributions with oxygen coverage are in accord with small changes expected in the surface binding energy as a result of surface oxidation.