Abstract
Secondary ion emission phenomena from a water and fluorine adsorbed Si(100) surface irradiated with electrons and highly charged ions (HCIs) were studied. In the case of HCI impact (400 eV/q Arq+ 4â©œqâ©œ8), H+ and F+ ions were detected in addition to Si(H)+ and SiOH+ ions resulted from a kinetic energy transfer. The yields of H+ and F+, which were also observed in the case of electron impact, increased with q like qÎł (ÎłâŒ3). This is the first paper reporting a strong charge state dependence of heavy adsorbate yields when slow HCIs bombard a well-defined surface covered with adsorbate.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
