Abstract
Roll-to-roll (R2R) ultraviolet (UV) imprinting technology, because of its merits of low cost, high throughput, and large-area patterning, is attracting interest from academia and industry for continuous fabrication of micro/nanostructures. Early reports of UV imprinting can be traced back to the 1970s, while R2R UV imprinting did not appear in the literature until 2006. This review surveys recent progress of R2R UV imprinting technology in terms of UV-curing resin material behavior, innovative apparatus, and typical processes involved in this method including resist filling, UV exposure, UV curing, and demolding. Roller mold fabrication is also thoroughly discussed, and challenges and innovations in mold fabrication techniques are comprehensively summarized. Typical industrial applications of UV imprinting are systematically cataloged. Finally, technical challenges and future trends for R2R UV imprinting technology to fabricate micro/nanostructures are presented.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.