Abstract
The emerging all-dielectric platform exhibits high-quality (Q) resonances governed by the physics of bound states in the continuum (BIC) that drives highly efficient nonlinear optical processes. Here we demonstrate the robust enhancement of third-(THG) and fifth-harmonic generation (FHG) from all-dielectric metasurfaces composed of four silicon nanodisks. Through the symmetry breaking, the genuine BIC transforms into the high-Q quasi-BIC resonance with tight field confinement for record high THG efficiency of 3.9 × 10-4 W-2 and FHG efficiency of 4.8 × 10-10 W-4 using a moderate pump intensity of 1 GW/cm2. Moreover, the quasi-BIC and the resonantly enhanced harmonics exhibit polarization-insensitive characteristics due to the special C4 arrangement of meta-atoms. Our results suggest the way for smart design of efficient and robust nonlinear nanophotonic devices.
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