Abstract
Novel ferroelectric/paraelectric variable capacitor (varactor) shunt switches have been designed, and experimentally verified recently. The ferroelectric/paraelectric varactor shunt switch operation is based on nonlinear dielectric tunability of a Ba <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.6</sub> Sr <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.4</sub> TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> (BST) thin-film sandwiched between two metal layers in the parallel plate configuration. Coplanar waveguide implementation of the varactor shunt switch results in a high speed RF switch, with a simple two-metal layer Si MMIC compatible process on high resistivity Si substrates
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