Abstract
An rf driven multicusp source has been operated in both cw and pulsed mode to generate H + and various types of positive ion beams. For inert gas plasmas such as He, Ne, Ar, Kr and Xe, the extractable current density is higher than 1 A/cm 2. When diatomic gases, such as H 2, N 2 and O 2 are used for the discharge, the extracted beam contains almost pure atomic ions. Thus, simple accelerator or plasma processing systems can be constructed without the use of mass analyzing magnets. The same source has also been used to produce steady-state beams of metallic ions.
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