Abstract
Isochronal and isothermal re-emissions of D atoms retained in Be by room temperature implantation with 3 keV D 2 − ions up to saturation have been studied by combined use of elastic recoil detection (ERD) and Rutherford backscattering (RBS) techniques. In the isochronal re-emission curves, two re-emission stages are observed, a stage at 90°C and a broad stage at 300 ± 100°C. It is found from the change in the ERD spectra that the former stage corresponds to re-emission of D retained around the projected range in the bulk and the latter broad stage is composed of two stages, a lower temperature one corresponds to re-emission from the oxidized surface layers and a higher temperature one from the bulk. From the analysis of the isothermal re-emission curves measured at various temperatures, the activation energies at the three re-emission stages are determined and the trapping states for the three stages are discussed.
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