Abstract

The response of a carbon nanotube field effect transistor (CNT-FET) to a vibrating gate has been investigated by scanning gate microscopy (SGM) with a frequency modulation (FM) mode in air at room temperature. Topography and current modulation images were obtained simultaneously. The CNT-FET successfully detected a cantilever vibration with an amplitude less than 50 nm and afrequency of 80 kHz.

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