Abstract
The design of a simple 2-dimensional resonator profilometer is presented. This instrument provides useful information of engineering surfaces such as height variations, edge point detection and some surface properties variations mainly elastic modulus and density. In this design the resonator probe is used to monitor the interfacial forces between stylus and a surface specimen along the z-axis and provides a feedback error signal into a digital piezoelectric translator (DPT) in order to maintain constant contact force. The specimen is scanned beneath the probe using a high precision single degree of freedom polymer bearing slideways monitored by a laser interferometer system. As the specimen is traversed, the probe 'feels' the contact force, and moves up and down to maintain constant force. Specimens ranging from thin metallic films to flat glass surfaces are used to illustrate its metrological capability.
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