Residual vibration control based on a global search method in a high-speed white light scanning interferometer.

Abstract

To achieve high-speed measurements using white light scanning interferometers, the scanning devices used need to have high feedback gain in closed-loop operations. However, flexure hinges induce a residual vibration that can cause a misidentification of the fringe order. The reduction of this residual vibration is crucial because the highly nonlinear distortions in interferograms lead to clearly incorrect measured profiles. Input shaping can be used to control the amplitude of the residual vibration. The conventional method uses continuous wavelet transform (CWT) to estimate parameters of the scanning device. Our proposed method extracts equivalent modal parameters using a global search algorithm. Due to its simplicity, ease of implementation, and response speed, this global search method outperforms CWT. The delay time is shortened by searching, because fewer modes are needed for the shaper. The effectiveness of the method has been confirmed by the agreement between simulated shaped responses and experimental displacement information from the capacitive sensor inside the scanning device, and the intensity profiles of the interferometer have been greatly improved. An experiment measuring the surface of a silicon wafer is also presented. The method is shown to be effective at improving the intensity profiles and recovering accurate surface topography. Finally, frequency localizations are found to be almost stable with different proportional gains, but their energy distributions change.