Abstract
The model of valveless piezoelectric micropump with planar conical tube is established in this paper, and dynamic mesh technology is used to simulate the unsteady characteristics of the micropump at different pressure amplitudes and driving frequencies for different diffusion angles. The elements affecting the output performance of the micropump are analyzed. The research indicates that the longer the conical tube, the smaller the flux that flows into the cavity of the micropump during inhalation. While the longer the conical tube, the greater the flux that flows out of the cavity of the micropump during expulsion. The net output flux of the valveless piezoelectric micropump increases with the length of the conical tube. The rectification efficiencies of micropump with tube length of 1mm, 3mm, and 5mm are 8.77%, 14.58%, and 18%, respectively.
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