Abstract
The piezoelectric ultrasonic actuator is driven by the friction coupling between the stator and mover. Its friction pairs are very important, but there are few studies on the long-term output stability. Therefore, zirconia (ZrO2) is selected as a stator material to form friction pairs with four different wear-resistant materials: silicon nitride (Si3N4), ZrO2, bearing steel (GCr15) and polyether ether ketone (PEEK). Experiments show that the friction pair composed of ZrO2-Si3N4 is the best, and the attenuation percentage of the speed from the initial state to the end state in the speed rising stage of 50 m is 3.66%. A linear piezoelectric platform is developed based on the best friction pair; a maximum speed of 426.2 mm/s and a resolution of 85 nm are achieved.
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