Abstract
In a physical process, there might be more than one acceleration to be measured, but a micro accelerometer of a certain testing range can hardly satisfy the measurement requirement. In this paper, a micro accelerometer array with four testing ranges, namely, 0∼100g, 0∼500g, 0∼1,000g and 0∼2,000g, is designed and fabricated. In addition to the design and fabrication process, the protection for the array elements on the condition of overload is described in detail. From the static and dynamic measurement results, it is known that the array has linearity smaller than 2.5%, what’s more, it has quite good frequency response characteristics. The experimental results demonstrate that the array can be used for the measurement of a physical process with multi-acceleration.
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