Research on Measurement of Ball Screw Helical Line Error Based on Electronic Generative Metrology

Abstract

Aiming at the disadvantages of current error measuring instruments of ball screw helix, a new screw helical line error measuring device is developed, moreover, a new method called electronic generative metrology (EGM) is introduced. The problem of measuring head deformation has been settled down because of installation of two driving motors on the instrument, so it is easy to achieve dynamic high precision measurement. Taking the long grating and circular grating as length and angle measurement datum respectively, the torque motor and linear motor are able to form position close-loop control. The measuring head frame is installed on air flotation slider which has characters of high kinematic accuracy and stability, so it guarantees high measurement accuracy. Then, the measurement accuracy analysis of the device is given. And the last, the EGM is developed by using this new research tool. Related experimental studies are conducted to verify the feasibility of the new method.