Abstract
In order to reduce volume of MEMS wireless sensor with solar photoelectric micro-power supply, the integration scheme of solar photoelectric micro-power supply on chip is proposed in the paper. The scheme is consisted of seven main process steps, and has higher process compatibility. The characteristics of the integrated devices of the solar photoelectric micro-power supply are analyzed by using the semiconductor theory. The results show the device characteristics meet the requirement of the solar photoelectric micro-power supply. Moreover, the technology improving conversion efficiency of solar cells on chip is proposed by use of the back surfaces field (BSF). The conversion efficiency of solar cells reached 13.4%
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
