Research and progress of rapid polishing technology for large aperture optics

Abstract

In view of the ultra-precision machining for large aperture optics developing rapidly but lacking effective rapid polishing methods, the research problems worth further studying are pointed out. The current situation, removing mechanism and processing difficulties of large aperture ultra-precision machine are introduced. The quantity and diameter of plane optics are increasing year by year, but currently the rapid removing of ultra-precision machine based on deterministic control of surface shape of the meter size optical components is still a blank. The development of related field is seriously affected huge losses caused by the low precision and low processing efficiency. The research situation of the high accuracy and rapid polishing methods are introduced for the main factors in the polishing processing system, such as movement patterns, polishing pad, polishing slurry and process parameters. According to the characteristics of the polishing machining process that bad deterministic control of the surface shape and the low removal efficiency, the research emphasis should be the methods that deterministic control and rapid removing of the machine, a new generation of high precision and high efficiency rapid polishing equipment and application process suitable for the large aperture and flat optical components.