Abstract
ABSTRACTWe investigated relationships between self-texture and interfacial restriction on the epitaxy of directed, bonded, thin films. Defect structures in ZnO films grown epitaxially on (0001)sapphire mere evaluated by 3—dimensional maping of k—spacing using an X—ray double crystal spectrometer. The orientation distribution and variation in lattice spacing of the films wre individually measured to elucidate the mechanism of growth. The growth mode was found to change at a film thickness of approximately 100 Å. The layer within 100Å of the interface had a small orientation distribution (1.8'), a large lattice spacing distribution, and a large cumpressive stress.The layer that was more than 100Å from the interface had a larger orientation distribution, a smaller lattice spacing distribution, and a smaller compressive stress.
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