Relationship between Basal Plane Dislocation and Local Basal Plane Bending in PVT-Grown 4H-SiC Crystals

Abstract

Synchrotron monochromatic beam x-ray topography (SMBXT) shows black and white contrast of BPDs for Burgers vectors of opposite signs based on the principle of ray tracing. We have evaluated the ratio of black and white contrast of BPDs along both [1120] and [1100] directions across multiple 4-inch and 6-inch diameter 4H-SiC substrates. Results show the predominance of white contrast BPDs along both radial directions indicating that the basal planes on Si face are bent in a convex manner. Line scans of 0004 reflection using HRXRD was carried out which further confirmed the nature of basal plane bending in these wafers. Detailed analysis on the subsequent wafers across the crystal boule reveals the inheritance of basal plane bending behavior in these wafers. The radius of curvature in 6-inch wafers was found to be larger than the 4-inch wafers. Additional studies on the effect of low angle grain boundaries were also discussed.