Abstract

Elliptically profiled mirrors operating at glancing angle are frequently used at X-ray synchrotron sources to focus X-rays into sub-micrometer sized spots. Mirror figure error, defined as the height difference function between the actual mirror surface and the ideal elliptical profile, causes a perturbation of the X-ray wavefront for X- rays reflecting from the mirror. This perturbation, when propagated to the focal plane results in an increase in the size of the focused beam. At Diamond Light Source we are developing refractive optics that can be used to locally cancel out the wavefront distortion caused by figure error from nano-focusing elliptical mirrors. These optics could be used to correct existing optical components on synchrotron radiation beamlines in order to give focused X-ray beam sizes approaching the theoretical diffraction limit. We present our latest results showing measurement of the X-ray wavefront error after reflection from X-ray mirrors and the translation of the measured wavefront into a design for refractive optical elements for correction of the X-ray wavefront. We show measurement of the focused beam with and without the corrective optics inserted showing reduction in the size of the focus resulting from the correction to the wavefront.

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