Abstract

In surface science the direct imaging of the surface topography of single crystals is of great interest for the investigation of surface-changing processes. Imaging can be done in transmission electron microscopy (TEM) as well as in reflection electron microscopy (REM) using a diffracted beam with surface-sensitive intensity. Surface steps of atomic height can be imaged with both methods. The highest resolution is obtainable only in transmission; however, for the investigation of surface treatments, the reflection method from bulk single crystals is more suitable, even with a lack of resolution, since the thin TEM specimens are often not mechanically stable against surface treatments. With this technique the initial stage of epitaxy, the influence of surface reactions, corrosion etc. on the surface topography can be investigated. The application of REM requires that two important conditions be met, one concerning the specimen itself. Due to the small angle of observation the image is foreshortened.

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