Abstract
Abstract Surface undulations on semiconductor devices can increase chip package interaction stress that leads to possible passivation cracking. This is especially so for flip chip interconnects which have solder balls that are in contact with the passivation layer. The solder balls have a larger Coefficient of Thermal Expansion (CTE) compared to the passivation layers and this can lead to increase in fracture rate especially during reflow cooling. The other factor is the underfill material. The flat passivation design can reduce the chip package interaction for underfill material but it needed to be evaluated numerically for wafer level stress before being touted as a solution towards reducing passivation cracks. In Part II of this series of papers, the flat passivation layer thicknesses were numerically simulated and modified using response surface methodology design of experiments (RSM DOE) techniques. The optimized passivation layer thickness showed decreased stress which was validated using a simulation confirmation run.
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