Abstract
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that use an optical fiber probe. This probe consists of a stylus shaft with a diameter of 2.5 µm and a glass ball with a diameter of 5 µm attached to the stylus tip. In this study, the measurement system, placed in a vacuum vessel, is constructed suitably to prevent adhesion of the stylus tip to the measured surface caused by the surface force resulting from the van der Waals force, electrostatic force, and liquid bridge force. First, these surface forces are analyzed with the aim of investigating the causes of adhesion. Subsequently, the effects of pressure inside the vacuum vessel on surface forces are evaluated. As a result, it is found that the surface force is 0.13 µN when the pressure inside the vacuum vessel is 350 Pa. This effect is equivalent to a 60% reduction in the surface force in the atmosphere.
Highlights
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc
When the particle size is less than several tens of micrometers, the effects of surface force generated from the van der Waals force, electrostatic force, and liquid bridge force are strengthened and this surface force becomes greater than the force of gravity [11]
The stylus tip is set to vibrate in a circular motion, where it traces a circle of diameter surface forces apparatus (SFA), atomic force microscopy (AFM), micro cantilever (MC), optical
Summary
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. The observed adhesion, which is influenced by environmental factors (e.g., humidity) and the roughness of the measurement surface, is not reproducible In another previous work, we developed a measurement system for. 2 oftip to the surface being measured [12] In this system, the stylus tip is set to vibrate in a circular motion, where it traces a circle of diameter 0.4 μm in the X‐Y plane. The surface roughness cannot the be stylus tip comes into contact with theusing measured surface,fiber it adheres measured in the scanning mode when the vibrating probe. There are many for measuring surface such asbeing thosemeasured involving[12] In this system, the stylus tip is set to vibrate in a circular motion, where it traces a circle of diameter surface forces apparatus (SFA), atomic force microscopy (AFM), micro cantilever (MC), optical.
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