Abstract
Conventional chemical shifts in organic compounds usually consist of a redshift; however, hybrid-type SiOC films were found to exhibit a redshit and a blueshift. These chemical shifts originate from the interaction between the C–H bond and highly electronegative oxygen. The bonding structures of SiOC films can be divided into two types depending on the observed chemical shifts and consist of a Si–O–C cross-link structure and a Si–O–C cage-link structure. The blue shift in SiOC films is associated with the porosity due to an increase in the number of electron-rich groups, such as methyl radicals, resulting in the formation of a Si–O–C cage link structure. On the other hand, the Si–O–C cross-link structure associated with a redshift is generated from the adhesion due to C–H bond elongation.
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