Abstract
For efficient electrical insulation in vacuum equipment, it is needed to clarify the mechanism of electrostatic charging and resulting discharge processes on a dielectric surface. We investigated charging characteristics on solid dielectrics in vacuum by real-time and high-speed measurement systems. By applying negative DC ramped voltage to the electrode with a cathode triple-junction (TJ), we measured the time transition of surface charge accumulation and current waveforms expressing the electron emission from TJ, by electrostatic probes. From the measurement results, we clarified a steplike charging process and proposed the electron emission model by taking the electric field and its relaxation by charging into account.
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