Abstract

Parallel acquisition of spatially resolved electron energy-loss spectra (SREELS) enables the characterization of interfaces on a nanometer scale using the fairly weak but chemically specific coreabsorption edges. A major hurdle for the routine qualitative and quantitative analysis is the very low signal-to-background ratio (and consequently low signal-to-noise ratio, SNR) of the absorption edge of a dilute element. In situations where the background is only slowly varying with energy, the weak edge may be exposed from the intense background either by empirically fitting a power-law curve prior to the edge and extrapolating, or by acquiring the spectrum in the 1st or 2nd energy difference modes (In the limit of small energy shifts such difference spectra are equivalent to derivatives with respect to energy loss). However, these techniques are unsuitable when: the background is strongly energy dependant, such as when the weak edge overlaps severely with the ELNES or EXELFS of a preceding edge; the region of interest is radiation sensitive; or there is specimen drift.

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