Abstract

Different oxygen exchange reactions have been studied in the system. The exchange rates have been measured by monitoring the isotopic concentration in a closed system and using isotopic labeled (with , , , and ) NO and gas mixtures. Pressure dependency and activation energies for the different exchange reactions , , , and have been measured. The oxygen exchange is discussed from the perspective of the reaction occurring on during the oxidation of Si. The activation energy was the same for the exchange between molecules catalyzed by and oxygen transport in , and the pressure dependency of the exchange could explain the pressure dependency of the oxygen transport in . These two experimental findings indicate that the dissociation of is the rate‐determining step for oxygen transport. In pure NO the experimental results gave no clear indication, mainly because the exchange rate between NO molecules in the system was too high to be measured and could only be estimated for the lowest pressure (0.1 mbar) and at room temperature. © 1999 The Electrochemical Society. All rights reserved.

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