Abstract

The reaction of ZrCl4 with 2,2-dimethylbutanoic acid in excess of the acid and also in o-xylene at boiling point of the solvent was studied. Formed zirconium tetrakis(2,2-dimethylbutanoate) is volatile in vacuum that allows its using as a precursor for the preparation of inorganic materials by chemical vapor deposition. During the reaction Zr(C6H11O2)4 is condensed to form polynuclear complexes.

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