Abstract
AbstractIt is possible to fabricate nanostructures of 25.5 nm by replication using injection molding. In this study, a silicon calibration grating was used as a mold insert to replicate high‐quality nanostructures with a simple custom‐made injection machine. The replicated grating with 25.5‐nm nanofeatures made with a polymer was of high quality when a high mold temperature was employed and the mold was evacuated. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci, 2008
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