Abstract
AbstractThe new technique of metalorganic magnetron sputtering (MOMS) produces high-quality (100) epitaxial InSb films on (100) GaAs substrates, despite the large 14.6% lattice mismatch between InSb and GaAs. We have used Raman scattering to examine MOMS-grown InSb films of thicknesses 0.17 - 2.67 µm, and commercial bulk InSb. We observe the longitudinal optical (LO) phonon peak, and the second order 2LO peak, which is enhanced by outgoing resonance with the E1 + Δ1, gap of InSb. The half-widths and intensities of these bands are related to sample quality as a function of film thickness and to the role of biaxial stress in the InSb film.
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