Abstract
Radio frequency potential has been revealed in inductively coupled plasma (ICP) immersed in a weak magnetic field. The rf plasma potential measured in a wide range of driving frequency and argon pressure reached tens of volts at a relatively weak magnetic field and was found falling with an increase in the driving frequency and gas pressure. The appearance of rf plasma potential in magnetized ICP is interpreted as a result of rf Hall effect caused by the electron rf drift in a crossed magnetic field.
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