Abstract
A radio‐frequency atmospheric‐pressure plasma process has been applied to the synthesis of ultrafine ZrC powders using ZrCl4 and CH4 as precursors. Both thermodynamic analysis and experiments were conducted and the as‐prepared samples were characterized by X‐ray diffraction, electron microscopy, and laser scattering. Results showed that ZrC powders with particle size <100 nm and surface area of 36.56 M2/g could be obtained. The addition of excess H2 contributed to the increase in conversion rate. The conversion rate was about 65% when the carrier gas ratio (H2/CH4) was set at 4.0 and added axially through the injection probe.
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